Optical 3D profilometer for in-process measurement of microsurface based on phase retrieval technique

We have proposed an optical method that can be applied to in-process or in situ measurement of the microsurface profile. The present method is based on optically performed spectral analysis and the phase retrieval technique. Spectral information of a surface profile is obtained by measuring the Fraunhofer diffraction intensity. The phase retrieval technique is used to reconstruct the surface profile from the measured spectrum. We have developed an instrument on the basis of the general principles of the present method, and measured the surface of a reference standard having rectangular pockets 44 nm deep at intervals of 10 m. The measured surface profile was in good agreement with the nominal dimensions of the specimen as well as the surface profile obtained by atomic force microscopy (AFM). © 2003 Elsevier Inc. All rights reserved. PACS: 07.60.-j; 42.30.Rx; 42.25.Fx; 68.35.Bs; 81.70.Fy